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Title

A Fuzzy-neural Approach Incorporating Exponentially Discounted Future Workload for Predicting Wafer Lot Output Time

Author

Horng-Ren Tsai, Toly Chen

Citation

Vol. 7  No. 1  pp. 60-64

Abstract

Lot output time prediction is a critical task to a wafer fabrication plant (wafer fab). To enhance the effectiveness, a look-ahead FBPN incorporating the future release plan is constructed in this study. Three nearest exponentially discounted future workloads, modified from Chen¡¯s nearest future discounted workloads, are proposed for the look-ahead function. According to experimental results, the prediction accuracy of the look-ahead FBPN was significantly better than those of some existing approaches. Besides, the proposed nearest exponentially discounted future workload functions are shown to be more effective than Chen¡¯s nearest future discounted workload functions in incorporating the fab¡¯s future release plan.

Keywords

Fuzzy back propagation network, Output time prediction, Wafer fabrication

URL

http://paper.ijcsns.org/07_book/200701/200701A09.pdf